Surface and Bulk Acoustic Waves in Multilayer Structures
نویسنده
چکیده
The application of various layers on a piezoelectric substrate is a way of improving the parameters of propagating electroacoustic waves. For example, a metal film of certain thickness may provide the thermal stability of the wave for substrate cuts, corresponding to a high electromechanical coupling coefficient. The overlayer can vary the wave propagation velocity and, hence, the operating frequency of a device. The effect of the environment (gas or liquid) on the properties of the wave in the layered structure is used in sensors. The layer may protect the piezoelectric substrate against undesired external impacts. Multilayer compositions allow to reduce a velocity dispersion, which is observed in single-layer structures. In multilayer film bulk acoustic wave resonators (FBAR) many layers are necessary for proper work of such devices. Therefore, analysis and optimization of the wave propagation characteristics in multilayer structures seems to be topical. General methods of numerical calculations of the surface and bulk acoustic wave parameters in arbitrary multilayer structures are described in this chapter.
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